TY - GEN
T1 - Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities
AU - Thomas, O.
AU - Mathieu, F.
AU - Mansfield, W.
AU - Huang, C.
AU - Trolier-McKinstry, S.
AU - Nicu, L.
PY - 2013
Y1 - 2013
N2 - We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
AB - We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
UR - http://www.scopus.com/inward/record.url?scp=84875443578&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84875443578&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474310
DO - 10.1109/MEMSYS.2013.6474310
M3 - Conference contribution
AN - SCOPUS:84875443578
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 588
EP - 591
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -