Piezoelectric polyimide tactile sensors

G. M. Atkinson, R. E. Pearson, Zoubeida Ounaies, C. Park, J. S. Harrison, J. A. Midkiff

Research output: Contribution to journalConference articlepeer-review

11 Scopus citations


An important application of piezoelectric materials is for tactile sensing. For non-planar applications, polymer materials offer the potential to provide flexible tactile sensors conforming to a variety of surface geometries. We have demonstrated a fabrication process for fabricating MEMS tactile sensor structures using a novel high-temperature piezoelectric polyimlde as the sensing material. The process consists of conventional lithography and metalization processes and uses a sacrificial layer of photoresist. Electrodes are fabricated on the upper and lower surfaces of the suspended bridge and cantilever structures and a self-test electrode is fabricated underlying each suspended component for testing. Prototype structures have been fabricated on silicon substrates for the purposes of process demonstration and characterization.

Original languageEnglish (US)
Pages (from-to)308-311
Number of pages4
JournalBiennial University/Government/Industry Microelectronics Symposium - Proceedings
StatePublished - Sep 1 2003
Event15th Biennial University/Government/Industry Microelectronics Symposium - Boise, ID, United States
Duration: Jun 30 2003Jul 2 2003

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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