Piezoelectric polyimide tactile sensors

Keyphrases

• Polyimide 100%
• Tactile Sensor 100%
• Silicon Substrate 50%
• Piezoelectric Materials 50%
• Sensing Materials 50%
• Fabrication Methods 50%
• High Temperature piezoelectric 50%
• Lithography 50%
• Self-testing 50%
• Polymer Materials 50%
• Bridge Structure 50%
• Non-planar 50%
• Sacrificial Layer 50%
• Photoresist 50%
• Cantilever Structure 50%
• Surface Geometry 50%
• Prototype Structure 50%
• Sensor Structure 50%

Engineering

• Piezoelectric 100%
• Silicon Substrate 50%
• Piezoelectric Material 50%
• Sensing Material 50%
• Microelectromechanical System 50%
• Polymer Material 50%
• Lithography 50%
• Photoresist 50%

Material Science

• Piezoelectricity 100%
• Polyimide 100%
• Silicon 50%
• Piezoelectric Material 50%
• Microelectromechanical System 50%
• Lithography 50%
• Polymer Application 50%