TY - GEN
T1 - Piezoelectric T-beam microactuators
AU - Kommepalli, Hareesh K.R.
AU - Rahn, Christopher D.
AU - Hirsh, Andrew D.
AU - Tadigadapa, Srinivas A.
PY - 2009
Y1 - 2009
N2 - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
AB - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
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M3 - Conference contribution
AN - SCOPUS:69949133354
SN - 9780791843253
SN - 9780791843284
T3 - 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
SP - 909
EP - 914
BT - 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
T2 - 2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Y2 - 3 August 2008 through 6 August 2008
ER -