Piezoelectric T-beam microactuators

Hareesh K R Kommepalli, Andrew D. Hirsh, Christopher D. Rahn, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

Original languageEnglish (US)
Title of host publicationASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
Pages909-914
Number of pages6
DOIs
StatePublished - 2008
EventASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 - Brooklyn, NY, United States
Duration: Aug 3 2008Aug 6 2008

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Other

OtherASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
Country/TerritoryUnited States
CityBrooklyn, NY
Period8/3/088/6/08

All Science Journal Classification (ASJC) codes

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

Fingerprint

Dive into the research topics of 'Piezoelectric T-beam microactuators'. Together they form a unique fingerprint.

Cite this