TY - GEN
T1 - Piezoelectric thin films for a high frequency ultrasound transducer with integrated electronics
AU - Kim, H.
AU - Griggio, F.
AU - Kim, I. S.
AU - Choi, K.
AU - Tutwiler, R. L.
AU - Jackson, T. N.
AU - Trolier-McKinstry, S.
PY - 2010/12/1
Y1 - 2010/12/1
N2 - Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films in the stack were patterned using ion-beam etching and partially released from the underlying silicon substrate by XeF2 etching. Impedance measurements on the fabricated structures showed resonance frequencies between 3 and 70 MHz for fully and partially released structures depending on the transducer dimensions and vibration modes. In-water transmit and receive functionalities have been demonstrated. A bandwidth on receive of 66 % has been determined for partially released structures.
AB - Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films in the stack were patterned using ion-beam etching and partially released from the underlying silicon substrate by XeF2 etching. Impedance measurements on the fabricated structures showed resonance frequencies between 3 and 70 MHz for fully and partially released structures depending on the transducer dimensions and vibration modes. In-water transmit and receive functionalities have been demonstrated. A bandwidth on receive of 66 % has been determined for partially released structures.
UR - http://www.scopus.com/inward/record.url?scp=79951862744&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79951862744&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690594
DO - 10.1109/ICSENS.2010.5690594
M3 - Conference contribution
AN - SCOPUS:79951862744
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 2186
EP - 2188
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -