@inproceedings{59bfbb343c8d4e7da691ab8176a4e422,
title = "Piezoelectric thin films for a high frequency ultrasound transducer with integrated electronics",
abstract = "Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films in the stack were patterned using ion-beam etching and partially released from the underlying silicon substrate by XeF2 etching. Impedance measurements on the fabricated structures showed resonance frequencies between 3 and 70 MHz for fully and partially released structures depending on the transducer dimensions and vibration modes. In-water transmit and receive functionalities have been demonstrated. A bandwidth on receive of 66 \% has been determined for partially released structures.",
author = "H. Kim and F. Griggio and Kim, \{I. S.\} and K. Choi and Tutwiler, \{R. L.\} and Jackson, \{T. N.\} and S. Trolier-McKinstry",
year = "2010",
month = dec,
day = "1",
doi = "10.1109/ICSENS.2010.5690594",
language = "English (US)",
isbn = "9781424481682",
series = "Proceedings of IEEE Sensors",
pages = "2186--2188",
booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",
note = "9th IEEE Sensors Conference 2010, SENSORS 2010 ; Conference date: 01-11-2010 Through 04-11-2010",
}