TY - GEN
T1 - Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices
AU - Liu, Tianning
AU - Wallace, Margeaux
AU - Trolier-McKinstry, Susan E.
AU - Jackson, Thomas Nelson
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/8/1
Y1 - 2017/8/1
N2 - Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.
AB - Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.
UR - https://www.scopus.com/pages/publications/85028072297
UR - https://www.scopus.com/pages/publications/85028072297#tab=citedBy
U2 - 10.1109/DRC.2017.7999459
DO - 10.1109/DRC.2017.7999459
M3 - Conference contribution
AN - SCOPUS:85028072297
T3 - Device Research Conference - Conference Digest, DRC
BT - 75th Annual Device Research Conference, DRC 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 75th Annual Device Research Conference, DRC 2017
Y2 - 25 June 2017 through 28 June 2017
ER -