Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices

Keyphrases

• Piezoelectric Thin Film 100%
• Polyimide Substrate 100%
• Release Process 50%
• PZT Thin Films 50%
• Silicon Wafer 50%
• Energy Harvester 50%
• Transfer Process 50%
• Sensor Energy 50%
• Sensor Transducer 50%

Engineering

• Thin Films 100%
• Piezoelectric 100%
• Piezoelectric Device 100%
• Transfer Process 50%
• Transducer 50%
• Silicon Wafer 50%
• Harvester 50%

Material Science

• Thin Films 100%
• Piezoelectricity 100%
• Polyimide 100%
• Film 66%
• Transfer Process 33%
• Silicon Wafer 33%