TY - GEN
T1 - piezoelectric transducers using micromachined bulk piezo substrates
AU - Jiang, Xiaoning
AU - Snook, K. A.
AU - Hackenberger, W. S.
AU - Cheng, A.
AU - Xu, J.
PY - 2008
Y1 - 2008
N2 - for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.
AB - for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.
UR - http://www.scopus.com/inward/record.url?scp=67649968631&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=67649968631&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2008.4716504
DO - 10.1109/ICSENS.2008.4716504
M3 - Conference contribution
AN - SCOPUS:67649968631
SN - 9781424425808
T3 - Proceedings of IEEE Sensors
SP - 573
EP - 576
BT - 2008 IEEE Sensors, SENSORS 2008
T2 - 2008 IEEE Sensors, SENSORS 2008
Y2 - 26 October 2008 through 29 October 2008
ER -