Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Shuxiang Dong; Siak P. Lim; Kwork H. Lee; Jingdong Zhang; Leong C. Lim; Kenji Uchino

doi:10.1109/TUFFC.2003.1197958

Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Shuxiang Dong, Siak P. Lim, Kwork H. Lee, Jingdong Zhang, Leong C. Lim, Kenji Uchino

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

111 Scopus citations

Abstract

A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

Original language	English (US)
Pages (from-to)	361-367
Number of pages	7
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	50
Issue number	4
DOIs	https://doi.org/10.1109/TUFFC.2003.1197958
State	Published - Apr 2003

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2003.1197958

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abstract = "A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.",

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AU - Dong, Shuxiang

AU - Lim, Siak P.

AU - Lee, Kwork H.

AU - Zhang, Jingdong

AU - Lim, Leong C.

AU - Uchino, Kenji

PY - 2003/4

Y1 - 2003/4

N2 - A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

AB - A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

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ER -

Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Abstract

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