Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Shuxiang Dong, Siak P. Lim, Kwork H. Lee, Jingdong Zhang, Leong C. Lim, Kenji Uchino

Research output: Contribution to journalArticlepeer-review

113 Scopus citations


A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

Original languageEnglish (US)
Pages (from-to)361-367
Number of pages7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number4
StatePublished - Apr 2003

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


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