Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Shuxiang Dong; Siak P. Lim; Kwork H. Lee; Jingdong Zhang; Leong C. Lim; Kenji Uchino

doi:10.1109/TUFFC.2003.1197958

Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Shuxiang Dong
, Siak P. Lim
, Kwork H. Lee
, Jingdong Zhang
, Leong C. Lim
, Kenji Uchino

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

117 Scopus citations

Abstract

A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

Original language	English (US)
Pages (from-to)	361-367
Number of pages	7
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	50
Issue number	4
DOIs	https://doi.org/10.1109/TUFFC.2003.1197958
State	Published - Apr 2003

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2003.1197958

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@article{fe3ac2ac4d904bc4ba2ea129685353a6,

title = "Piezoelectric ultrasonic micromotor with 1.5 mm diameter",

abstract = "A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.",

author = "Shuxiang Dong and Lim, \{Siak P.\} and Lee, \{Kwork H.\} and Jingdong Zhang and Lim, \{Leong C.\} and Kenji Uchino",

year = "2003",

month = apr,

doi = "10.1109/TUFFC.2003.1197958",

language = "English (US)",

volume = "50",

pages = "361--367",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4",

}

TY - JOUR

T1 - Piezoelectric ultrasonic micromotor with 1.5 mm diameter

AU - Dong, Shuxiang

AU - Lim, Siak P.

AU - Lee, Kwork H.

AU - Zhang, Jingdong

AU - Lim, Leong C.

AU - Uchino, Kenji

PY - 2003/4

Y1 - 2003/4

N2 - A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

AB - A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

UR - https://www.scopus.com/pages/publications/0037811737

UR - https://www.scopus.com/pages/publications/0037811737#tab=citedBy

U2 - 10.1109/TUFFC.2003.1197958

DO - 10.1109/TUFFC.2003.1197958

M3 - Article

C2 - 12744391

AN - SCOPUS:0037811737

SN - 0885-3010

VL - 50

SP - 361

EP - 367

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 4

ER -

Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Abstract

All Science Journal Classification (ASJC) codes

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