Plasma generation by dielectric resonator arrays

Arrays of dielectric resonators - illuminated by an antenna - are used to ignite and sustain multiple microwave plasmas in parallel. Calcium titanate cylindrical resonators were arranged in a linear array with separation distances between 0.5 and 5 mm. The operating frequency was near the HEM₁₁₁ resonance of 1.1 GHz. Paschen curves of the breakdown field and voltage in argon atmosphere are consistent with parallel plate microwave breakdown except within discharge gaps of 1 mm or less. Sustaining of argon plasma between 0.5 Torr and 1 atm within the array is found to alter the electromagnetic scattering from the dielectric resonators, suggesting applications in plasma-reconfigurable metamaterials and photonic crystals.