Plastic deformation and residual stresses in SiC boules grown by PVT

S. Ha, G. S. Rohrer, M. Skowronski, V. D. Heydemann, D. W. Snyder

    Research output: Contribution to journalConference articlepeer-review

    11 Scopus citations

    Abstract

    The thermoelastic stress distribution in growing 6H SiC crystals was simulated using a two dimensional finite element model. Based on the calculated stress distribution, possible plastic deformation of the material was postulated. High resolution x-ray diffraction (HRXRD) was used to detect the net deformation and residual stresses in the grown crystals. The results were in agreement with the postulated plastic deformation.

    Original languageEnglish (US)
    Pages (from-to)I/-
    JournalMaterials Science Forum
    Volume338
    StatePublished - 2000
    EventICSCRM '99: The International Conference on Silicon Carbide and Related Materials - Research Triangle Park, NC, USA
    Duration: Oct 10 1999Oct 15 1999

    All Science Journal Classification (ASJC) codes

    • General Materials Science
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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