Abstract
The thermoelastic stress distribution in growing 6H SiC crystals was simulated using a two dimensional finite element model. Based on the calculated stress distribution, possible plastic deformation of the material was postulated. High resolution x-ray diffraction (HRXRD) was used to detect the net deformation and residual stresses in the grown crystals. The results were in agreement with the postulated plastic deformation.
Original language | English (US) |
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Pages (from-to) | I/- |
Journal | Materials Science Forum |
Volume | 338 |
State | Published - 2000 |
Event | ICSCRM '99: The International Conference on Silicon Carbide and Related Materials - Research Triangle Park, NC, USA Duration: Oct 10 1999 → Oct 15 1999 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering