@inproceedings{9eea87cffc52432d9b477412e7742111,
title = "Platinum black electroplated impedance particle sensor",
abstract = "We present a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 μm polystyrene beads passing the sensing electrodes are successfully obtained.",
author = "Siyang Zheng and Mike Liu and Kasdan, {Harvey L.} and Tai, {Yu Chong}",
year = "2006",
month = jan,
day = "1",
doi = "10.1109/NEMS.2006.334628",
language = "English (US)",
isbn = "1424401402",
series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
publisher = "IEEE Computer Society",
pages = "87--91",
booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
address = "United States",
note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",
}