| Original language | English (US) |
|---|---|
| Title of host publication | MEMS |
| Subtitle of host publication | Design and Fabrication |
| Publisher | CRC Press |
| Pages | 9 |
| Number of pages | 1 |
| ISBN (Electronic) | 9781420036565 |
| ISBN (Print) | 9780849391385 |
| State | Published - Nov 29 2005 |
All Science Journal Classification (ASJC) codes
- General Arts and Humanities