Polymeric micromechanical components with tunable stiffness

E. Manias; J. Chen; N. Fang; X. Zhang

doi:10.1063/1.1400084

Polymeric micromechanical components with tunable stiffness

E. Manias, J. Chen, N. Fang, X. Zhang

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

We present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.

Original language	English (US)
Pages (from-to)	1700-1702
Number of pages	3
Journal	Applied Physics Letters
Volume	79
Issue number	11
DOIs	https://doi.org/10.1063/1.1400084
State	Published - Sep 10 2001

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1400084

Cite this

@article{4d7bd9a98ab04f4a9bb673ff158d395d,

title = "Polymeric micromechanical components with tunable stiffness",

abstract = "We present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.",

author = "E. Manias and J. Chen and N. Fang and X. Zhang",

year = "2001",

month = sep,

day = "10",

doi = "10.1063/1.1400084",

language = "English (US)",

volume = "79",

pages = "1700--1702",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "11",

}

TY - JOUR

T1 - Polymeric micromechanical components with tunable stiffness

AU - Manias, E.

AU - Chen, J.

AU - Fang, N.

AU - Zhang, X.

PY - 2001/9/10

Y1 - 2001/9/10

N2 - We present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.

AB - We present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.

UR - http://www.scopus.com/inward/record.url?scp=0035839822&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035839822&partnerID=8YFLogxK

U2 - 10.1063/1.1400084

DO - 10.1063/1.1400084

M3 - Article

AN - SCOPUS:0035839822

SN - 0003-6951

VL - 79

SP - 1700

EP - 1702

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Polymeric micromechanical components with tunable stiffness

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this