Polymeric substrate microcrystalline-silicon strain sensor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


The microcrystalline-silicon (μC-Si) strain sensors fabricated directly on flexible polyimide substrates with similar gage factor were investigated. To maintain substrate flatness and provide improved thermal transfer during fabrication, a pressure-sensitive silicone gel adhesive layer was used to mount the Kapton® substrates onto glass carriers. An anisotropic conductive film was used to electrically connect the sample to a flexible cable which connects the strain sensors to a PC boards. Results show ∼0.85 gage factor, similar to metallic foil stain sensors, but with greatly reduced sensor area and power consumption.

Original languageEnglish (US)
Title of host publicationDevice Research Conference - Conference Digest, 62nd DRC
Number of pages2
StatePublished - 2004
EventDevice Research Conference - Conference Digest, 62nd DRC - Notre Dame, IN, United States
Duration: Jun 21 2004Jun 23 2004

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770


OtherDevice Research Conference - Conference Digest, 62nd DRC
Country/TerritoryUnited States
CityNotre Dame, IN

All Science Journal Classification (ASJC) codes

  • General Engineering


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