Polysilicon micro-heaters for resonance tuning in CMOS photonics
- Rakesh M. Krishna
- , Ali Eftekhar
- , Sanghoon Lee
- , Tianren Fan
- , Xi Wu
- , Amir Hosseinnia
- , Hua Wang
- , Madhavan Swaminathan
- , Ali Adibi
Research output: Contribution to journal › Article › peer-review
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