@inbook{6df692089a3d42c5baa2de56d29beca9,
title = "Porosity of Low Dielectric Constant Materials",
author = "Gidley, {David W.} and Peng, {Hua Gen} and Richard Vallery and Soles, {Christopher L.} and Lee, {Hae Jeong} and Vogt, {Bryan D.} and Lin, {Eric K.} and Wu, {Wen Li} and Baklanov, {Mikhail R.}",
year = "2007",
month = mar,
day = "19",
doi = "10.1002/9780470017944.ch3",
language = "English (US)",
isbn = "0470013605",
pages = "85--136",
booktitle = "Dielectric Films for Advanced Microelectronics",
publisher = "wiley",
}