@inbook{6df692089a3d42c5baa2de56d29beca9,
title = "Porosity of Low Dielectric Constant Materials",
author = "Gidley, \{David W.\} and Peng, \{Hua Gen\} and Richard Vallery and Soles, \{Christopher L.\} and Lee, \{Hae Jeong\} and Vogt, \{Bryan D.\} and Lin, \{Eric K.\} and Wu, \{Wen Li\} and Baklanov, \{Mikhail R.\}",
year = "2007",
month = mar,
day = "19",
doi = "10.1002/9780470017944.ch3",
language = "English (US)",
isbn = "0470013605",
pages = "85--136",
booktitle = "Dielectric Films for Advanced Microelectronics",
publisher = "wiley",
}