Abstract
The molecular ruler method allows the precise control of the gap between a parent gold structure and a deposited daughter structure using a conveniently grown self-assembled molecular multilayer as a lithographic mask. However, we cannot choose a position where the gap should be placed, since the ruler attaches to all exposed gold surfaces. In this work, a convenient method of selecting the position of nanogaps by further patternine the molecular multilayer usine low-energy electron beam irradiation and piranha etchant is described.
Original language | English (US) |
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Pages (from-to) | L950-L953 |
Journal | Japanese Journal of Applied Physics |
Volume | 43 |
Issue number | 7 B |
DOIs | |
State | Published - Jul 15 2004 |
All Science Journal Classification (ASJC) codes
- General Engineering
- General Physics and Astronomy