POWER HANDLING CHALLENGES OF HIGH KT2ALSCN LAMB WAVE RESONATORS

Mingyo Park; Yue Zheng; Azadeh Ansari

POWER HANDLING CHALLENGES OF HIGH K_T²ALSCN LAMB WAVE RESONATORS

Mingyo Park, Yue Zheng, Azadeh Ansari

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work reports on the first demonstration of a first-order symmetric (S1) mode Lamb-wave resonator (LWR) based on sputtered Al1-xScxN (x~%30), with a large electromechanical coupling coefficient (kt2) up to 13.7%, and frequencies in the range of 340 MHz up to 9.9 GHz. To fulfill the high-power requirements for today's radio frequency applications, we introduced a comprehensive study on the characterization of the resonator nonlinearity depending on device Q, and the power-handling capability based on different Sc/(Sc+Al) ratios and thermal conductivities. Additionally, we report the highest kt2 AlN-based LWRs of 13.7% and bode Q of 334 at 2.7GHz. This work shows the first study of 1-dB gain compression point vs. Sc/(Al+Sc).

Original language	English (US)
Title of host publication	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Editors	Reza Ghodssi, Jenna F. Chan
Publisher	Transducer Research Foundation
Pages	56-59
Number of pages	4
ISBN (Electronic)	9781940470047
State	Published - 2022
Event	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 - Hilton Head, United States Duration: Jun 5 2022 → Jun 9 2022

Publication series

Name	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022

Conference

Conference	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Country/Territory	United States
City	Hilton Head
Period	6/5/22 → 6/9/22

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Cite this

@inproceedings{d412944f3ad848aa8356bce2652ad2de,

title = "POWER HANDLING CHALLENGES OF HIGH KT2ALSCN LAMB WAVE RESONATORS",

abstract = "This work reports on the first demonstration of a first-order symmetric (S1) mode Lamb-wave resonator (LWR) based on sputtered Al1-xScxN (x~%30), with a large electromechanical coupling coefficient (kt2) up to 13.7%, and frequencies in the range of 340 MHz up to 9.9 GHz. To fulfill the high-power requirements for today's radio frequency applications, we introduced a comprehensive study on the characterization of the resonator nonlinearity depending on device Q, and the power-handling capability based on different Sc/(Sc+Al) ratios and thermal conductivities. Additionally, we report the highest kt2 AlN-based LWRs of 13.7% and bode Q of 334 at 2.7GHz. This work shows the first study of 1-dB gain compression point vs. Sc/(Al+Sc).",

author = "Mingyo Park and Yue Zheng and Azadeh Ansari",

note = "Publisher Copyright: {\textcopyright} 2022 TRF.; 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 ; Conference date: 05-06-2022 Through 09-06-2022",

year = "2022",

language = "English (US)",

series = "2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022",

publisher = "Transducer Research Foundation",

pages = "56--59",

editor = "Reza Ghodssi and Chan, {Jenna F.}",

booktitle = "2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022",

}

Park, M, Zheng, Y & Ansari, A 2022, POWER HANDLING CHALLENGES OF HIGH K_T²ALSCN LAMB WAVE RESONATORS. in R Ghodssi & JF Chan (eds), 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022. 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022, Transducer Research Foundation, pp. 56-59, 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022, Hilton Head, United States, 6/5/22.

POWER HANDLING CHALLENGES OF HIGH K_T²ALSCN LAMB WAVE RESONATORS. / Park, Mingyo; Zheng, Yue; Ansari, Azadeh.
2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022. ed. / Reza Ghodssi; Jenna F. Chan. Transducer Research Foundation, 2022. p. 56-59 (2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Ansari, Azadeh

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N2 - This work reports on the first demonstration of a first-order symmetric (S1) mode Lamb-wave resonator (LWR) based on sputtered Al1-xScxN (x~%30), with a large electromechanical coupling coefficient (kt2) up to 13.7%, and frequencies in the range of 340 MHz up to 9.9 GHz. To fulfill the high-power requirements for today's radio frequency applications, we introduced a comprehensive study on the characterization of the resonator nonlinearity depending on device Q, and the power-handling capability based on different Sc/(Sc+Al) ratios and thermal conductivities. Additionally, we report the highest kt2 AlN-based LWRs of 13.7% and bode Q of 334 at 2.7GHz. This work shows the first study of 1-dB gain compression point vs. Sc/(Al+Sc).

AB - This work reports on the first demonstration of a first-order symmetric (S1) mode Lamb-wave resonator (LWR) based on sputtered Al1-xScxN (x~%30), with a large electromechanical coupling coefficient (kt2) up to 13.7%, and frequencies in the range of 340 MHz up to 9.9 GHz. To fulfill the high-power requirements for today's radio frequency applications, we introduced a comprehensive study on the characterization of the resonator nonlinearity depending on device Q, and the power-handling capability based on different Sc/(Sc+Al) ratios and thermal conductivities. Additionally, we report the highest kt2 AlN-based LWRs of 13.7% and bode Q of 334 at 2.7GHz. This work shows the first study of 1-dB gain compression point vs. Sc/(Al+Sc).

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M3 - Conference contribution

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