@article{e56d11eb26014c1b93334b71a965cd12,
title = "Preface for the AVS Peter Mark award 40th anniversary collection",
author = "Aydil, \{Eray S.\} and Kessels, \{Wilhelmus M.M.\} and Stephanie Law and Mohan Sankaran and Zide, \{Joshua M.O.\}",
year = "2021",
month = may,
day = "1",
doi = "10.1116/6.0001005",
language = "English (US)",
volume = "39",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}