Preferential sputtering of binary compounds: A model study

Barbara J. Garrison

doi:10.1016/0039-6028(82)90453-8

Preferential sputtering of binary compounds: A model study

Barbara J. Garrison

Research output: Contribution to journal › Article › peer-review

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Abstract

A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.

Original language	English (US)
Pages (from-to)	23-37
Number of pages	15
Journal	Surface Science
Volume	114
Issue number	1
DOIs	https://doi.org/10.1016/0039-6028(82)90453-8
State	Published - Jan 2 1982

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0039-6028(82)90453-8

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title = "Preferential sputtering of binary compounds: A model study",

abstract = "A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.",

author = "Garrison, {Barbara J.}",

note = "Funding Information: Support is gratefully acknowledged from the National Science Foundation, the Office of Naval Research, and the Research Corporation. In addition, we thank the Camille and Henry Dreyfus Foundation for a grant for Newly Appointed Young Faculty and the Alfred P. Sloan Foundation for a Research Fellowship. We also thank R. Kelly, I.S.T. Tsong, P. Williams, N. Winograd and K. Foley for helpful discussions.",

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N2 - A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.

AB - A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.

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Preferential sputtering of binary compounds: A model study

Abstract

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