TY - JOUR
T1 - Preparation of sputtered (Ba x′Sr 1-x)TiO 3 thin films directly on copper
AU - Laughlin, Brian
AU - Ihlefeld, Jon
AU - Maria, Jon Paul
PY - 2005/9
Y1 - 2005/9
N2 - (Ba 0.6,Sr 0.4)TiO 3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. By the use of controlled pO 2 high-temperature anneals, the films were completely crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) revealed an abrupt Cu/BST interface. The deposited BST films exhibit a zero bias permittivity and loss tangent values of 600 and 0.018, respectively. An electrical tunability ratio of 3.5:1 is observed on these metal-insulator-metal devices. Devices show leakage currents of 10 -8 A/cm 2 at ±10 V/μm, and loss tangents as low as 0.003 in fields approaching 40 V/μm.
AB - (Ba 0.6,Sr 0.4)TiO 3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. By the use of controlled pO 2 high-temperature anneals, the films were completely crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) revealed an abrupt Cu/BST interface. The deposited BST films exhibit a zero bias permittivity and loss tangent values of 600 and 0.018, respectively. An electrical tunability ratio of 3.5:1 is observed on these metal-insulator-metal devices. Devices show leakage currents of 10 -8 A/cm 2 at ±10 V/μm, and loss tangents as low as 0.003 in fields approaching 40 V/μm.
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U2 - 10.1111/j.1551-2916.2005.00488.x
DO - 10.1111/j.1551-2916.2005.00488.x
M3 - Article
AN - SCOPUS:27644525549
SN - 0002-7820
VL - 88
SP - 2652
EP - 2654
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 9
ER -