Preparation of sputtered (Ba x′Sr 1-x)TiO 3 thin films directly on copper

Brian Laughlin, Jon Ihlefeld, Jon Paul Maria

Research output: Contribution to journalArticlepeer-review

33 Scopus citations


(Ba 0.6,Sr 0.4)TiO 3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. By the use of controlled pO 2 high-temperature anneals, the films were completely crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) revealed an abrupt Cu/BST interface. The deposited BST films exhibit a zero bias permittivity and loss tangent values of 600 and 0.018, respectively. An electrical tunability ratio of 3.5:1 is observed on these metal-insulator-metal devices. Devices show leakage currents of 10 -8 A/cm 2 at ±10 V/μm, and loss tangents as low as 0.003 in fields approaching 40 V/μm.

Original languageEnglish (US)
Pages (from-to)2652-2654
Number of pages3
JournalJournal of the American Ceramic Society
Issue number9
StatePublished - Sep 2005

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry


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