Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices

M. T. Alam; M. A. Haque

doi:10.1109/Transducers.2013.6626882

Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices

M. T. Alam, M. A. Haque

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

While the current trend in nanoscale materials characterization is to investigate single domain (mechanical, electrical, thermal) properties, this study explore if the extremely small size also 'couples' these domains. However, even single domain studies are challenging at the nanoscale and the literature suggests the need for new multi-domain characterization techniques. In this paper, we present experimental design for performing nanoscale multi-physics characterizations. Demonstrative results on the role of mechanical strain on the thermal and electrical conductivity of metals, semiconductors and insulators are also presented.

Original language	English (US)
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Publisher	IEEE Computer Society
Pages	780-783
Number of pages	4
ISBN (Print)	9781467359818
DOIs	https://doi.org/10.1109/Transducers.2013.6626882
State	Published - 2013
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: Jun 16 2013 → Jun 20 2013

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	6/16/13 → 6/20/13

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/Transducers.2013.6626882

Cite this

Alam, M. T., & Haque, M. A. (2013). Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 780-783). Article 6626882 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). IEEE Computer Society. https://doi.org/10.1109/Transducers.2013.6626882

Alam, M. T. ; Haque, M. A. / Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. IEEE Computer Society, 2013. pp. 780-783 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

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abstract = "While the current trend in nanoscale materials characterization is to investigate single domain (mechanical, electrical, thermal) properties, this study explore if the extremely small size also 'couples' these domains. However, even single domain studies are challenging at the nanoscale and the literature suggests the need for new multi-domain characterization techniques. In this paper, we present experimental design for performing nanoscale multi-physics characterizations. Demonstrative results on the role of mechanical strain on the thermal and electrical conductivity of metals, semiconductors and insulators are also presented.",

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pages = "780--783",

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Alam, MT & Haque, MA 2013, Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6626882, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, IEEE Computer Society, pp. 780-783, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 6/16/13. https://doi.org/10.1109/Transducers.2013.6626882

Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices. / Alam, M. T.; Haque, M. A.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. IEEE Computer Society, 2013. p. 780-783 6626882 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - While the current trend in nanoscale materials characterization is to investigate single domain (mechanical, electrical, thermal) properties, this study explore if the extremely small size also 'couples' these domains. However, even single domain studies are challenging at the nanoscale and the literature suggests the need for new multi-domain characterization techniques. In this paper, we present experimental design for performing nanoscale multi-physics characterizations. Demonstrative results on the role of mechanical strain on the thermal and electrical conductivity of metals, semiconductors and insulators are also presented.

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Alam MT, Haque MA. Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. IEEE Computer Society. 2013. p. 780-783. 6626882. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). doi: 10.1109/Transducers.2013.6626882

Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices

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