Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)

Victor Chan; I. Ok; S. Choi; T. Gordon; N. Arnold; I. Saraf; S. McDermott; K. Brew; T. Philip; H. Utomo; W. T. Tseng; C. Silvestre; N. Li; J. Li; J. Demarest; J. P. Han; A. Gasasira; R. Pujari; N. Saulnier; S. Teehan; Ishtiaq Ahsan

doi:10.1109/ASMC57536.2023.10121078

Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)

Victor Chan, I. Ok, S. Choi, T. Gordon, N. Arnold, I. Saraf, S. McDermott, K. Brew, T. Philip, H. Utomo, W. T. Tseng, C. Silvestre, N. Li, J. Li, J. Demarest, J. P. Han, A. Gasasira, R. Pujari, N. Saulnier, S. TeehanIshtiaq Ahsan

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We discuss the process challenges such as the heater geometry effect, heater patterning processes and deep via formation. Based on the electrical data, we improve the processes and Phase Change memory (PCM) resistance distribution to meet Analog Computing requirement.

Original language	English (US)
Title of host publication	2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665456395
DOIs	https://doi.org/10.1109/ASMC57536.2023.10121078
State	Published - 2023
Event	34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023 - Saratoga Springs, United States Duration: May 1 2023 → May 4 2023

Publication series

Name	ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
Volume	2023-May
ISSN (Print)	1078-8743

Conference

Conference	34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023
Country/Territory	United States
City	Saratoga Springs
Period	5/1/23 → 5/4/23

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
General Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/ASMC57536.2023.10121078

Cite this

Chan, V., Ok, I., Choi, S., Gordon, T., Arnold, N., Saraf, I., McDermott, S., Brew, K., Philip, T., Utomo, H., Tseng, W. T., Silvestre, C., Li, N., Li, J., Demarest, J., Han, J. P., Gasasira, A., Pujari, R., Saulnier, N., ... Ahsan, I. (2023). Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM). In 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023 (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings; Vol. 2023-May). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASMC57536.2023.10121078

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title = "Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)",

abstract = "We discuss the process challenges such as the heater geometry effect, heater patterning processes and deep via formation. Based on the electrical data, we improve the processes and Phase Change memory (PCM) resistance distribution to meet Analog Computing requirement.",

author = "Victor Chan and I. Ok and S. Choi and T. Gordon and N. Arnold and I. Saraf and S. McDermott and K. Brew and T. Philip and H. Utomo and Tseng, {W. T.} and C. Silvestre and N. Li and J. Li and J. Demarest and Han, {J. P.} and A. Gasasira and R. Pujari and N. Saulnier and S. Teehan and Ishtiaq Ahsan",

note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023 ; Conference date: 01-05-2023 Through 04-05-2023",

year = "2023",

doi = "10.1109/ASMC57536.2023.10121078",

language = "English (US)",

series = "ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023",

address = "United States",

}

Chan, V, Ok, I, Choi, S, Gordon, T, Arnold, N, Saraf, I, McDermott, S, Brew, K, Philip, T, Utomo, H, Tseng, WT, Silvestre, C, Li, N, Li, J, Demarest, J, Han, JP, Gasasira, A, Pujari, R, Saulnier, N, Teehan, S & Ahsan, I 2023, Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM). in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023. ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, vol. 2023-May, Institute of Electrical and Electronics Engineers Inc., 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023, Saratoga Springs, United States, 5/1/23. https://doi.org/10.1109/ASMC57536.2023.10121078

Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM). / Chan, Victor; Ok, I.; Choi, S. et al.
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023. Institute of Electrical and Electronics Engineers Inc., 2023. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings; Vol. 2023-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)

AU - Chan, Victor

AU - Ok, I.

AU - Choi, S.

AU - Gordon, T.

AU - Arnold, N.

AU - Saraf, I.

AU - McDermott, S.

AU - Brew, K.

AU - Philip, T.

AU - Utomo, H.

AU - Tseng, W. T.

AU - Silvestre, C.

AU - Li, N.

AU - Li, J.

AU - Demarest, J.

AU - Han, J. P.

AU - Gasasira, A.

AU - Pujari, R.

AU - Saulnier, N.

AU - Teehan, S.

AU - Ahsan, Ishtiaq

PY - 2023

Y1 - 2023

N2 - We discuss the process challenges such as the heater geometry effect, heater patterning processes and deep via formation. Based on the electrical data, we improve the processes and Phase Change memory (PCM) resistance distribution to meet Analog Computing requirement.

AB - We discuss the process challenges such as the heater geometry effect, heater patterning processes and deep via formation. Based on the electrical data, we improve the processes and Phase Change memory (PCM) resistance distribution to meet Analog Computing requirement.

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DO - 10.1109/ASMC57536.2023.10121078

M3 - Conference contribution

AN - SCOPUS:85159755968

T3 - ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

BT - 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023

Y2 - 1 May 2023 through 4 May 2023

ER -

Chan V, Ok I, Choi S, Gordon T, Arnold N, Saraf I et al. Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM). In 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2023. Institute of Electrical and Electronics Engineers Inc. 2023. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings). doi: 10.1109/ASMC57536.2023.10121078

Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)

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