Skip to main navigation Skip to search Skip to main content

Process Damage and Contamination Effects for Shallow Si Implanted GaAs

  • H. Baratte
  • , A. J. Fleischman
  • , G. J. Scilla
  • , T. N. Jackson
  • , H. J. Hovel
  • , F. Cardone

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Process Damage and Contamination Effects for Shallow Si Implanted GaAs'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science

Engineering