Process integration of an interlevel dielectric (ILDO) module using a building-in reliability approach

Ronald E. Paulsen, Carl S. Kyono, Yun Wang, Kevin M. Klein, I. S. Lim, S. Tinkler, B. Bellamak, David W. Odle, Zhixu Zhou, P. Dahl, Mark Giovanetto, Jitendra Makwana, S. Patel, Chris Reno, Patrick M. Lenahan, Curt A. Billman

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

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Material Science