Abstract
The operation of a run-to-run system usually takes places in two phases or stages. In the first stage, a new equipment is “qualified,” which means that experiments are conducted in order to find a recipe that optimizes the performance of the equipment. The qualification stage is based on design of experiments techniques and the use of a set of experimental optimization techniques called response surface methods.
Original language | English (US) |
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Title of host publication | Run-to-Run Control in Semiconductor Manufacturing |
Publisher | CRC Press |
Pages | 219-228 |
Number of pages | 10 |
ISBN (Electronic) | 9781420040661 |
ISBN (Print) | 0849311780, 9780849311789 |
State | Published - Jan 1 2000 |
All Science Journal Classification (ASJC) codes
- General Engineering