Process recipe optimization

Research output: Chapter in Book/Report/Conference proceedingChapter


The operation of a run-to-run system usually takes places in two phases or stages. In the first stage, a new equipment is “qualified,” which means that experiments are conducted in order to find a recipe that optimizes the performance of the equipment. The qualification stage is based on design of experiments techniques and the use of a set of experimental optimization techniques called response surface methods.

Original languageEnglish (US)
Title of host publicationRun-to-Run Control in Semiconductor Manufacturing
PublisherCRC Press
Number of pages10
ISBN (Electronic)9781420040661
ISBN (Print)0849311780, 9780849311789
StatePublished - Jan 1 2000

All Science Journal Classification (ASJC) codes

  • General Engineering


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