Process recipe optimization

Enrique Del Castillo

Process recipe optimization

Enrique Del Castillo

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

The operation of a run-to-run system usually takes places in two phases or stages. In the first stage, a new equipment is “qualified,” which means that experiments are conducted in order to find a recipe that optimizes the performance of the equipment. The qualification stage is based on design of experiments techniques and the use of a set of experimental optimization techniques called response surface methods.

Original language	English (US)
Title of host publication	Run-to-Run Control in Semiconductor Manufacturing
Publisher	CRC Press
Pages	219-228
Number of pages	10
ISBN (Electronic)	9781420040661
ISBN (Print)	0849311780, 9780849311789
State	Published - Jan 1 2000

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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abstract = "The operation of a run-to-run system usually takes places in two phases or stages. In the first stage, a new equipment is “qualified,” which means that experiments are conducted in order to find a recipe that optimizes the performance of the equipment. The qualification stage is based on design of experiments techniques and the use of a set of experimental optimization techniques called response surface methods.",

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BT - Run-to-Run Control in Semiconductor Manufacturing

PB - CRC Press

ER -

Process recipe optimization

Abstract

All Science Journal Classification (ASJC) codes

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