Keyphrases
Vanadium Oxide Thin Film
100%
Metal Target
100%
Hysteresis
100%
Pulsed DC
100%
Process-structure-property Relationship
100%
Structure-property Correlation
100%
Magnetron Sputtering
100%
Vanadium Metal
66%
DC Sputtering
66%
Cathode Current
66%
Resistivity
33%
Mass Flow
33%
Microstructure
33%
Electrical Properties
33%
Structural Properties
33%
Processing Conditions
33%
Columnar
33%
Argon
33%
Power Density
33%
Subtle Change
33%
Film Structure
33%
Micro-Raman Spectroscopy
33%
Hysteretic
33%
Temperature Coefficient of Resistance
33%
Oxygen Flow Rate
33%
Gas Flow Rate
33%
Oxidized State
33%
Total Gas
33%
Metallic State
33%
Equiaxed Grain Structure
33%
Charge Transport Mechanism
33%
Material Science
Vanadium
100%
Thin Films
100%
Oxide Compound
100%
Cathode
100%
Film
50%
Density
25%
Electrical Resistivity
25%
Gas Flow
25%
Micro-Raman Spectroscopy
25%
Crystal Microstructure
25%