Abstract
Submicron grain sized PZT-5A ceramics have been produced with properties comparable to conventional coarse grained material. The degradation in dielectric and piezoelectric properties with decreasing grain size was compensated with a new dopant strategy. This made the materials piezoelectrically softer compensating for reductions in poling efficiency. The submicron grain sized material has been shown to be superior to coarse grained ceramic during fine scale dicing operations.
Original language | English (US) |
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Pages | 903-906 |
Number of pages | 4 |
State | Published - 1996 |
Event | Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) - East Brunswick, NJ, USA Duration: Aug 18 1996 → Aug 21 1996 |
Other
Other | Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) |
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City | East Brunswick, NJ, USA |
Period | 8/18/96 → 8/21/96 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering