Processing dependence of biaxial texture in yttria-stabilized zirconia by lon-beam-assisted deposition

Biaxially textured yttria (8 mol%)-stabilized zirconia (YSZ) thin films were deposited on randomly oriented Hastelloy C and Stainless Steel 304 at room temperature as a buffer layer for subsequent deposition of oriented YBa2Cu3Ox films. The 0.16-1.3 (im thick YSZ films were deposited by ebeam evaporation at rates of 1.2-3.2 A/see. Biaxially textured films were produced with an Ar/O: ion beam directed at the substrate during film growth. X-ray diffraction was used to study in-plane and out-of-plane orientation as a function of ionbombardment angle, film thickness, ion-to-atom flux ratio, and substrate material. In-plane and out-of-plane averagemisorientation angles on these YSZ films that were deposited by ion-beam-assisted deposition were as low as 17 and 5.4°, respectively, on as-received substrates.