Processing technologies for high-permittivity thin films in capacitor applications

  • Geoff L. Brennecka
  • , Jon F. Ihlefeld
  • , Jon Paul Maria
  • , Bruce A. Tuttle
  • , Paul G. Clem

Research output: Contribution to journalArticlepeer-review

115 Scopus citations

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Keyphrases

Engineering

Material Science

Chemical Engineering