Properties of hydrogenated Nanoporous SiC: An Ab initio study

Blair R. Tuttle, Nathan J. Held, Lai Hin Lam, Yu Yang Zhang, Sokrates T. Pantelides

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


Nanoporous silicon carbide is part of the important organosilicate class of low dielectric constant alloys. We report first-principles microscopic calculations of the properties of crystalline nanoporous SiCH systems. Properties examined include the density, pore size, dielectric constant, and strain moduli. We examined the relationship between the various properties and the amount of hydrogen in the material. In addition, the bonding topology is examined. The present results are compared with a variety of experiments.

Original languageEnglish (US)
Article number4705734
JournalJournal of Nanomaterials
StatePublished - 2017

All Science Journal Classification (ASJC) codes

  • General Materials Science


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