Properties of PZT thin films as a function of in-plane biaxial stress

Keyphrases

• Annealing Conditions 33%
• Applied Load 33%
• As-received 33%
• Axial Stress 100%
• Bottom Electrode 33%
• Capacitance 33%
• Capacitors 66%
• Coercive Field 33%
• Compressive Load 33%
• Field Strength 33%
• In Situ 33%
• Lead Zirconate Titanate 66%
• Lead Zirconate Titanate Thin Films 100%
• Remnant Polarization 33%
• Residual Stress 33%
• Silica 33%
• Sol-gel Film 33%
• Sputtered Films 33%
• Stress State 100%
• Tensile Loading 33%
• Typical Value 33%

Engineering

• Applied Load 20%
• Applied Stress 20%
• Biaxial Stress 100%
• Coercive Field 20%
• Compression Load 20%
• Experimental Stress 20%
• Field Strength 20%
• Lead Zirconate 100%
• Measured Value 20%
• Residual Stress 20%
• Stress State 40%
• Tensile Loads 20%
• Thin Films 100%
• Titanate 100%

Material Science

• Capacitance 20%
• Capacitor 40%
• Compression Load 20%
• Film 60%
• Lead Zirconate Titanate 100%
• Residual Stress 20%
• Sol-Gel 20%
• Sputtered Film 20%
• Tensile Loads 20%
• Thin Films 100%