Prospects for imaging with TOF-SIMS using gold liquid metal ion sources

Amy V. Walker; Nicholas Winograd

doi:10.1016/S0169-4332(02)00624-4

Prospects for imaging with TOF-SIMS using gold liquid metal ion sources

Amy V. Walker, Nicholas Winograd

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ⁺⁺ , Au ⁺ or Au ₂ ⁺ primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ⁺⁺ ion bombardment may yield improved spectra for certain types of compounds.

Original language	English (US)
Pages (from-to)	198-200
Number of pages	3
Journal	Applied Surface Science
Volume	203-204
DOIs	https://doi.org/10.1016/S0169-4332(02)00624-4
State	Published - Jan 15 2003

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
General Physics and Astronomy
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/S0169-4332(02)00624-4

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title = "Prospects for imaging with TOF-SIMS using gold liquid metal ion sources",

abstract = " Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ++ , Au + or Au 2 + primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ++ ion bombardment may yield improved spectra for certain types of compounds.",

author = "Walker, {Amy V.} and Nicholas Winograd",

note = "Funding Information: The authors would like to thank the National Science Foundation and the National Institutes of Health for partial financial support of this work, Paul Blenkinsopp and Rowland Hill of Ionoptika for design of the mass selection chopper plates, and Nathan Davies and John Vickerman for sharing information about their AuGe source. The FEI Co. donated the AuSiBe source for this research.",

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doi = "10.1016/S0169-4332(02)00624-4",

language = "English (US)",

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pages = "198--200",

journal = "Applied Surface Science",

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T1 - Prospects for imaging with TOF-SIMS using gold liquid metal ion sources

AU - Walker, Amy V.

AU - Winograd, Nicholas

N1 - Funding Information: The authors would like to thank the National Science Foundation and the National Institutes of Health for partial financial support of this work, Paul Blenkinsopp and Rowland Hill of Ionoptika for design of the mass selection chopper plates, and Nathan Davies and John Vickerman for sharing information about their AuGe source. The FEI Co. donated the AuSiBe source for this research.

PY - 2003/1/15

Y1 - 2003/1/15

N2 - Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ++ , Au + or Au 2 + primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ++ ion bombardment may yield improved spectra for certain types of compounds.

AB - Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ++ , Au + or Au 2 + primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ++ ion bombardment may yield improved spectra for certain types of compounds.

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DO - 10.1016/S0169-4332(02)00624-4

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VL - 203-204

SP - 198

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JO - Applied Surface Science

JF - Applied Surface Science

ER -

Prospects for imaging with TOF-SIMS using gold liquid metal ion sources

Abstract

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