TY - JOUR
T1 - Prospects for imaging with TOF-SIMS using gold liquid metal ion sources
AU - Walker, Amy V.
AU - Winograd, Nicholas
N1 - Funding Information:
The authors would like to thank the National Science Foundation and the National Institutes of Health for partial financial support of this work, Paul Blenkinsopp and Rowland Hill of Ionoptika for design of the mass selection chopper plates, and Nathan Davies and John Vickerman for sharing information about their AuGe source. The FEI Co. donated the AuSiBe source for this research.
PY - 2003/1/15
Y1 - 2003/1/15
N2 - Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ++ , Au + or Au 2 + primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ++ ion bombardment may yield improved spectra for certain types of compounds.
AB - Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ++ , Au + or Au 2 + primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ++ ion bombardment may yield improved spectra for certain types of compounds.
UR - http://www.scopus.com/inward/record.url?scp=0037438201&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0037438201&partnerID=8YFLogxK
U2 - 10.1016/S0169-4332(02)00624-4
DO - 10.1016/S0169-4332(02)00624-4
M3 - Article
AN - SCOPUS:0037438201
SN - 0169-4332
VL - 203-204
SP - 198
EP - 200
JO - Applied Surface Science
JF - Applied Surface Science
ER -