Prospects for nanowire sculptured-thin-film devices

Sean M. Pursel; Mark W. Horn

doi:10.1116/1.2787749

Prospects for nanowire sculptured-thin-film devices

Sean M. Pursel, Mark W. Horn

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

In this paper, we introduce a modified serial bideposition (SBD) method, asymmetric SBD, for depositing sculptured thin films (STFs) which may allow added control of the surface area, void accessibility, and optical properties of STFs. Results on using Ti O2 STFs with spectral-hole filters as vapor/liquid sensors are presented. In addition, solar cell, microcavity, biological sensing, and bioabsorption devices utilizing STFs are discussed.

Original language	English (US)
Pages (from-to)	2611-2615
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25
Issue number	6
DOIs	https://doi.org/10.1116/1.2787749
State	Published - 2007

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2787749

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title = "Prospects for nanowire sculptured-thin-film devices",

abstract = "In this paper, we introduce a modified serial bideposition (SBD) method, asymmetric SBD, for depositing sculptured thin films (STFs) which may allow added control of the surface area, void accessibility, and optical properties of STFs. Results on using Ti O2 STFs with spectral-hole filters as vapor/liquid sensors are presented. In addition, solar cell, microcavity, biological sensing, and bioabsorption devices utilizing STFs are discussed.",

author = "Pursel, {Sean M.} and Horn, {Mark W.}",

note = "Funding Information: This research has been funded by the Penn State Materials Research Institute, Penn State Nanofabrication Facility, and Penn State Center for Nanoscale Science, a NSF-funded Materials Research Science and Engineering Center. Parts of this work were conducted at the Penn State node of the NSF-funded National Nanotechnology Infrastructure Network. The authors thank the Mallouk group, the Shaw Group, Akhlesh Lakhtakia, Jian Xu, Bill Burgos, and the Penn State Nanofabrication Center staff for helpful interactions and discussions.",

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doi = "10.1116/1.2787749",

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T1 - Prospects for nanowire sculptured-thin-film devices

AU - Pursel, Sean M.

AU - Horn, Mark W.

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PY - 2007

Y1 - 2007

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Prospects for nanowire sculptured-thin-film devices

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