Skip to main navigation Skip to search Skip to main content

Quantification of interfacial roughness of In2O3/ZrO2 superlattice films in 3D

  • X. Y. Zhong
  • , B. Kabius
  • , D. K. Schreiber
  • , J. A. Eastman
  • , D. D. Fong
  • , A. K. Petford-Long

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)600-601
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberSUPPL. 2
DOIs
StatePublished - Jul 2009

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this