Quantitative acoustic model for adhesion evaluation of PMMA/silicon film structures

Keyphrases

• Poly(methyl methacrylate) 100%
• Film Structure 100%
• Surface Acoustic Wave 100%
• Acoustic Wave Velocity 66%
• Silicon Substrate 33%
• Fabrication Methods 33%
• Physical Model 33%
• Velocity Reconstruction 33%
• Photolithography 33%
• Nondestructive Evaluation 33%
• Adhesion Failure 33%
• Quantitative Evaluation 33%
• Si Film 33%
• Scanning Acoustic Microscopy 33%
• Matrix Method 33%
• Semiconductor Manufacturing Process 33%
• Anisotropic Media 33%
• Acoustic Wave Propagation 33%

Engineering

• Surface Acoustic Wave 100%
• Film Silicon 100%
• Wave Velocity 66%
• Experimental Result 33%
• Silicon Substrate 33%
• Manufacturing Process 33%
• Semiconductor Manufacturing 33%
• Anisotropic 33%
• Optical Lithography 33%
• Reflectance 33%
• Quantitative Evaluation 33%
• Physical Model 33%
• Scanning Acoustic Microscopy 33%
• Matrix Method 33%