Quantitative evaluation of the nano-scaled polymeric film system

Tae Sung Park, Ik Keun Park, Chiaki Miyasaka, Bernhard R. Tittmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In recent years, a nano-scaled thin film often applied to the industries (e.g., MEMS/NEMS device, semiconductor, display, optical coating or the like). Generally the materials used to the nano-scaled thin film systems have different mechanical properties comparing to the conventional bulk materials. Therefore, it is important to measure the mechanical properties for the nano-scaled thin film. Especially the properties of the pre-treated surface of the substrate effect to the reliability of the adhesive strength between the film and the substrate. In this study we controlled the surface treatment processes to obtain the different adhesive conditions at the interfaces of the systems. Then, we applied acoustic spectroscopy (i.e., V(z) curve technique) to evaluate adhesive strength of the interface. Further, nano-scratch test was applied to the systems to obtain the co-relations between the SAW velocity and the adhesive strength, and the co-relation between the SAW velocity and hardness, respectively. Experiments on the system with different adhesive conditions showed that SAW velocity was sensitive enough to evaluate the film interface conditions. Consequently, the obtained preliminary data showed potentials for nondestructively characterizing the adhesive conditions at the interface of the nano-scaled thin film system with acoustic microscopy.

Original languageEnglish (US)
Title of host publicationImaging Methods for Novel Materials and Challenging Applications - Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics
Number of pages7
StatePublished - 2013
Event2012 Annual Conference on Experimental and Applied Mechanics - Costa Mesa, CA, United States
Duration: Jun 11 2012Jun 14 2012

Publication series

NameConference Proceedings of the Society for Experimental Mechanics Series
ISSN (Print)2191-5644
ISSN (Electronic)2191-5652


Other2012 Annual Conference on Experimental and Applied Mechanics
Country/TerritoryUnited States
CityCosta Mesa, CA

All Science Journal Classification (ASJC) codes

  • General Engineering
  • Computational Mechanics
  • Mechanical Engineering


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