@inproceedings{fbb7ae45fe7f4948a3ca91eb5ce862c9,
title = "Radiation induced leakage currents in dense and porous low-k dielectrics",
abstract = "We investigate leakage currents in a-SiOC:H thin films with electrically detected magnetic resonance (EDMR) and new zero field magnetoresistance measurements. We substantially change leakage currents by subjecting the dielectrics to 60Co gamma irradiation. Our results strongly suggest the potential of a very simple measurement, near zero field magnetoresistance, as a reliability physics tool in the investigation of transport mechanisms in these materials.",
author = "Waskiewicz, {Ryan J.} and Mutch, {Michael J.} and Lenahan, {Patrick M.} and King, {Sean W.}",
year = "2017",
month = apr,
day = "19",
doi = "10.1109/IIRW.2016.7904912",
language = "English (US)",
series = "Proceedings of the 2016 IEEE International Integrated Reliability Workshop, IIRW 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "99--102",
booktitle = "Proceedings of the 2016 IEEE International Integrated Reliability Workshop, IIRW 2016",
address = "United States",
note = "2016 IEEE International Integrated Reliability Workshop, IIRW 2016 ; Conference date: 09-10-2016 Through 13-10-2016",
}