Real-time response and system integration in a back-end semiconductor manufacturing system

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9 Scopus citations


Real-time response is fundamental to a Manufacturing Execution System used in a Back-end Semiconductor Manufacturing System (BSMS) on the shop floor. This paper presents a practical solution to easing system integration while improving its real-time responses. First, by incorporating the concept of Virtual Production Lines (VPL) into the Manufacturing Execution System modeling, the model complexity can be reduced significantly, consequently easing its integration to shop floor controls. Secondly, a new system integration framework will be introduced, which guarantees the real-time entries of system data for all the activities occurred on the shop floor. Real-time information helps management make optimal decisions, thus improve the productivity of a BSMS.

Original languageEnglish (US)
Pages (from-to)622-627
Number of pages6
JournalConference Record - IAS Annual Meeting (IEEE Industry Applications Society)
StatePublished - 2002
Event37th IAS Annual Meeting and World Conference on Industrial applications of Electrical Energy - Pittsburgh, PA, United States
Duration: Oct 13 2002Oct 18 2002

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


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