Real-time spectroscopic ellipsometry as a characterization tool for oxide molecular beam epitaxy

B. J. Gibbons; M. E. Hawley; S. Trolier-McKinstry; D. G. Schlom

doi:10.1116/1.1351054

Real-time spectroscopic ellipsometry as a characterization tool for oxide molecular beam epitaxy

B. J. Gibbons, M. E. Hawley, S. Trolier-McKinstry, D. G. Schlom

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

A real-time spectroscopic ellipsometer (RTSE) is integrated as a complementary tool for an oxide molecular beam epitaxy (MBE) system. The RTSE is used to characterize the deposition of (111)-oriented Y₂O₃ on (110)-oriented Si to quantify how the RTSE complemented the other tools in the MBE.

Original language	English (US)
Pages (from-to)	584-590
Number of pages	7
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	2
DOIs	https://doi.org/10.1116/1.1351054
State	Published - Mar 2001

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "A real-time spectroscopic ellipsometer (RTSE) is integrated as a complementary tool for an oxide molecular beam epitaxy (MBE) system. The RTSE is used to characterize the deposition of (111)-oriented Y2O3 on (110)-oriented Si to quantify how the RTSE complemented the other tools in the MBE.",

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AU - Schlom, D. G.

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AB - A real-time spectroscopic ellipsometer (RTSE) is integrated as a complementary tool for an oxide molecular beam epitaxy (MBE) system. The RTSE is used to characterize the deposition of (111)-oriented Y2O3 on (110)-oriented Si to quantify how the RTSE complemented the other tools in the MBE.

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Real-time spectroscopic ellipsometry as a characterization tool for oxide molecular beam epitaxy

Abstract

All Science Journal Classification (ASJC) codes

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