Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors

Yu Chuan Lin; Bhakti Jariwala; Brian M. Bersch; Ke Xu; Yifan Nie; Baoming Wang; Sarah M. Eichfeld; Xiaotian Zhang; Tanushree H. Choudhury; Yi Pan; Rafik Addou; Christopher M. Smyth; Jun Li; Kehao Zhang; M. Aman Haque; Stefan Fölsch; Randall M. Feenstra; Robert M. Wallace; Kyeongjae Cho; Susan K. Fullerton-Shirey; Joan M. Redwing; Joshua A. Robinson

doi:10.1021/acsnano.7b07059

Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors

Yu Chuan Lin, Bhakti Jariwala, Brian M. Bersch, Ke Xu, Yifan Nie, Baoming Wang, Sarah M. Eichfeld, Xiaotian Zhang, Tanushree H. Choudhury, Yi Pan, Rafik Addou, Christopher M. Smyth, Jun Li, Kehao Zhang, M. Aman Haque, Stefan Fölsch, Randall M. Feenstra, Robert M. Wallace, Kyeongjae Cho, Susan K. Fullerton-ShireyJoan M. Redwing, Joshua A. Robinson

Research output: Contribution to journal › Article › peer-review

184 Scopus citations

Abstract

Atomically thin transition metal dichalcogenides (TMDs) are of interest for next-generation electronics and optoelectronics. Here, we demonstrate device-ready synthetic tungsten diselenide (WSe₂) via metal-organic chemical vapor deposition and provide key insights into the phenomena that control the properties of large-area, epitaxial TMDs. When epitaxy is achieved, the sapphire surface reconstructs, leading to strong 2D/3D (i.e., TMD/substrate) interactions that impact carrier transport. Furthermore, we demonstrate that substrate step edges are a major source of carrier doping and scattering. Even with 2D/3D coupling, transistors utilizing transfer-free epitaxial WSe₂/sapphire exhibit ambipolar behavior with excellent on/off ratios (∼10⁷), high current density (1-10 μA·μm^-1), and good field-effect transistor mobility (∼30 cm²·V^-1·s^-1) at room temperature. This work establishes that realization of electronic-grade epitaxial TMDs must consider the impact of the TMD precursors, substrate, and the 2D/3D interface as leading factors in electronic performance.

Original language	English (US)
Pages (from-to)	965-975
Number of pages	11
Journal	ACS nano
Volume	12
Issue number	2
DOIs	https://doi.org/10.1021/acsnano.7b07059
State	Published - Feb 27 2018

All Science Journal Classification (ASJC) codes

General Materials Science
General Engineering
General Physics and Astronomy

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10.1021/acsnano.7b07059

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Lin, Y. C., Jariwala, B., Bersch, B. M., Xu, K., Nie, Y., Wang, B., Eichfeld, S. M., Zhang, X., Choudhury, T. H., Pan, Y., Addou, R., Smyth, C. M., Li, J., Zhang, K., Haque, M. A., Fölsch, S., Feenstra, R. M., Wallace, R. M., Cho, K., ... Robinson, J. A. (2018). Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors. ACS nano, 12(2), 965-975. https://doi.org/10.1021/acsnano.7b07059

@article{32b90557b0004127b971a8aca565b34f,

title = "Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors",

abstract = "Atomically thin transition metal dichalcogenides (TMDs) are of interest for next-generation electronics and optoelectronics. Here, we demonstrate device-ready synthetic tungsten diselenide (WSe2) via metal-organic chemical vapor deposition and provide key insights into the phenomena that control the properties of large-area, epitaxial TMDs. When epitaxy is achieved, the sapphire surface reconstructs, leading to strong 2D/3D (i.e., TMD/substrate) interactions that impact carrier transport. Furthermore, we demonstrate that substrate step edges are a major source of carrier doping and scattering. Even with 2D/3D coupling, transistors utilizing transfer-free epitaxial WSe2/sapphire exhibit ambipolar behavior with excellent on/off ratios (∼107), high current density (1-10 μA·μm-1), and good field-effect transistor mobility (∼30 cm2·V-1·s-1) at room temperature. This work establishes that realization of electronic-grade epitaxial TMDs must consider the impact of the TMD precursors, substrate, and the 2D/3D interface as leading factors in electronic performance.",

author = "Lin, {Yu Chuan} and Bhakti Jariwala and Bersch, {Brian M.} and Ke Xu and Yifan Nie and Baoming Wang and Eichfeld, {Sarah M.} and Xiaotian Zhang and Choudhury, {Tanushree H.} and Yi Pan and Rafik Addou and Smyth, {Christopher M.} and Jun Li and Kehao Zhang and Haque, {M. Aman} and Stefan F{\"o}lsch and Feenstra, {Randall M.} and Wallace, {Robert M.} and Kyeongjae Cho and Fullerton-Shirey, {Susan K.} and Redwing, {Joan M.} and Robinson, {Joshua A.}",

note = "Publisher Copyright: {\textcopyright} 2018 American Chemical Society.",

year = "2018",

month = feb,

day = "27",

doi = "10.1021/acsnano.7b07059",

language = "English (US)",

volume = "12",

pages = "965--975",

journal = "ACS nano",

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Lin, YC, Jariwala, B, Bersch, BM, Xu, K, Nie, Y, Wang, B, Eichfeld, SM, Zhang, X, Choudhury, TH, Pan, Y, Addou, R, Smyth, CM, Li, J, Zhang, K, Haque, MA, Fölsch, S, Feenstra, RM, Wallace, RM, Cho, K, Fullerton-Shirey, SK, Redwing, JM & Robinson, JA 2018, 'Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors', ACS nano, vol. 12, no. 2, pp. 965-975. https://doi.org/10.1021/acsnano.7b07059

TY - JOUR

T1 - Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors

AU - Lin, Yu Chuan

AU - Jariwala, Bhakti

AU - Bersch, Brian M.

AU - Xu, Ke

AU - Nie, Yifan

AU - Wang, Baoming

AU - Eichfeld, Sarah M.

AU - Zhang, Xiaotian

AU - Choudhury, Tanushree H.

AU - Pan, Yi

AU - Addou, Rafik

AU - Smyth, Christopher M.

AU - Li, Jun

AU - Zhang, Kehao

AU - Haque, M. Aman

AU - Fölsch, Stefan

AU - Feenstra, Randall M.

AU - Wallace, Robert M.

AU - Cho, Kyeongjae

AU - Fullerton-Shirey, Susan K.

AU - Redwing, Joan M.

AU - Robinson, Joshua A.

PY - 2018/2/27

Y1 - 2018/2/27

N2 - Atomically thin transition metal dichalcogenides (TMDs) are of interest for next-generation electronics and optoelectronics. Here, we demonstrate device-ready synthetic tungsten diselenide (WSe2) via metal-organic chemical vapor deposition and provide key insights into the phenomena that control the properties of large-area, epitaxial TMDs. When epitaxy is achieved, the sapphire surface reconstructs, leading to strong 2D/3D (i.e., TMD/substrate) interactions that impact carrier transport. Furthermore, we demonstrate that substrate step edges are a major source of carrier doping and scattering. Even with 2D/3D coupling, transistors utilizing transfer-free epitaxial WSe2/sapphire exhibit ambipolar behavior with excellent on/off ratios (∼107), high current density (1-10 μA·μm-1), and good field-effect transistor mobility (∼30 cm2·V-1·s-1) at room temperature. This work establishes that realization of electronic-grade epitaxial TMDs must consider the impact of the TMD precursors, substrate, and the 2D/3D interface as leading factors in electronic performance.

AB - Atomically thin transition metal dichalcogenides (TMDs) are of interest for next-generation electronics and optoelectronics. Here, we demonstrate device-ready synthetic tungsten diselenide (WSe2) via metal-organic chemical vapor deposition and provide key insights into the phenomena that control the properties of large-area, epitaxial TMDs. When epitaxy is achieved, the sapphire surface reconstructs, leading to strong 2D/3D (i.e., TMD/substrate) interactions that impact carrier transport. Furthermore, we demonstrate that substrate step edges are a major source of carrier doping and scattering. Even with 2D/3D coupling, transistors utilizing transfer-free epitaxial WSe2/sapphire exhibit ambipolar behavior with excellent on/off ratios (∼107), high current density (1-10 μA·μm-1), and good field-effect transistor mobility (∼30 cm2·V-1·s-1) at room temperature. This work establishes that realization of electronic-grade epitaxial TMDs must consider the impact of the TMD precursors, substrate, and the 2D/3D interface as leading factors in electronic performance.

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U2 - 10.1021/acsnano.7b07059

DO - 10.1021/acsnano.7b07059

M3 - Article

C2 - 29360349

AN - SCOPUS:85042116564

SN - 1936-0851

VL - 12

SP - 965

EP - 975

JO - ACS nano

JF - ACS nano

IS - 2

ER -

Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors

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