Recent advances in piezoelectric materials

T. R. Shrout; S. E. Park; C. A. Randall; J. P. Shepard; L. B. Hackenberger; D. Pickrell; W. S. Hackenberger

doi:10.1117/12.293509

Recent advances in piezoelectric materials

T. R. Shrout, S. E. Park, C. A. Randall, J. P. Shepard, L. B. Hackenberger, D. Pickrell, W. S. Hackenberger

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

Recent developments in piezoelectric materials include submicron grain size ceramics and single crystals. Pb(Zr,Ti)O₃ (PZT) ceramics with submicron grain sizes (~ 0.5 μm) have been produced with properties comparable to conventional, coarse grained (~ 3 to 5 μm) ceramics. The fine grain ceramics exhibit improved machinability over conventional materials. Ultrasonic transducer arrays with post widths less than 15 μm have been fabricated as well as thin plates with thicknesses as low as 10 μm. The yields and performance of such operations are expected to be much greater with fine grain ceramic than with conventional material. The single crystal piezoelectrics developed offer field induced strain an order of magnitude higher than what can be achieved in piezoelectric ceramic actuators (> 1%). Furthermore, the strain electric field hysteresis and dielectric losses are very low for these materials and electromechanical coupling factors (k₃₃) are greater than 90%. Applications which may benefit from the recent developments include smart materials and structures and MEMS.

Original language	English (US)
Pages (from-to)	56-67
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3241
DOIs	https://doi.org/10.1117/12.293509
State	Published - 1997
Event	Smart Materials, Structures, and Integrated Systems - Adelaide, SA, Australia Duration: Dec 10 1997 → Dec 10 1997

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.293509

Cite this

@article{53036acb9c844398991a697d366db5c7,

title = "Recent advances in piezoelectric materials",

abstract = "Recent developments in piezoelectric materials include submicron grain size ceramics and single crystals. Pb(Zr,Ti)O3 (PZT) ceramics with submicron grain sizes (~ 0.5 μm) have been produced with properties comparable to conventional, coarse grained (~ 3 to 5 μm) ceramics. The fine grain ceramics exhibit improved machinability over conventional materials. Ultrasonic transducer arrays with post widths less than 15 μm have been fabricated as well as thin plates with thicknesses as low as 10 μm. The yields and performance of such operations are expected to be much greater with fine grain ceramic than with conventional material. The single crystal piezoelectrics developed offer field induced strain an order of magnitude higher than what can be achieved in piezoelectric ceramic actuators (> 1%). Furthermore, the strain electric field hysteresis and dielectric losses are very low for these materials and electromechanical coupling factors (k33) are greater than 90%. Applications which may benefit from the recent developments include smart materials and structures and MEMS.",

author = "Shrout, {T. R.} and Park, {S. E.} and Randall, {C. A.} and Shepard, {J. P.} and Hackenberger, {L. B.} and D. Pickrell and Hackenberger, {W. S.}",

year = "1997",

doi = "10.1117/12.293509",

language = "English (US)",

volume = "3241",

pages = "56--67",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Smart Materials, Structures, and Integrated Systems ; Conference date: 10-12-1997 Through 10-12-1997",

}

TY - JOUR

T1 - Recent advances in piezoelectric materials

AU - Shrout, T. R.

AU - Park, S. E.

AU - Randall, C. A.

AU - Shepard, J. P.

AU - Hackenberger, L. B.

AU - Pickrell, D.

AU - Hackenberger, W. S.

PY - 1997

Y1 - 1997

N2 - Recent developments in piezoelectric materials include submicron grain size ceramics and single crystals. Pb(Zr,Ti)O3 (PZT) ceramics with submicron grain sizes (~ 0.5 μm) have been produced with properties comparable to conventional, coarse grained (~ 3 to 5 μm) ceramics. The fine grain ceramics exhibit improved machinability over conventional materials. Ultrasonic transducer arrays with post widths less than 15 μm have been fabricated as well as thin plates with thicknesses as low as 10 μm. The yields and performance of such operations are expected to be much greater with fine grain ceramic than with conventional material. The single crystal piezoelectrics developed offer field induced strain an order of magnitude higher than what can be achieved in piezoelectric ceramic actuators (> 1%). Furthermore, the strain electric field hysteresis and dielectric losses are very low for these materials and electromechanical coupling factors (k33) are greater than 90%. Applications which may benefit from the recent developments include smart materials and structures and MEMS.

AB - Recent developments in piezoelectric materials include submicron grain size ceramics and single crystals. Pb(Zr,Ti)O3 (PZT) ceramics with submicron grain sizes (~ 0.5 μm) have been produced with properties comparable to conventional, coarse grained (~ 3 to 5 μm) ceramics. The fine grain ceramics exhibit improved machinability over conventional materials. Ultrasonic transducer arrays with post widths less than 15 μm have been fabricated as well as thin plates with thicknesses as low as 10 μm. The yields and performance of such operations are expected to be much greater with fine grain ceramic than with conventional material. The single crystal piezoelectrics developed offer field induced strain an order of magnitude higher than what can be achieved in piezoelectric ceramic actuators (> 1%). Furthermore, the strain electric field hysteresis and dielectric losses are very low for these materials and electromechanical coupling factors (k33) are greater than 90%. Applications which may benefit from the recent developments include smart materials and structures and MEMS.

UR - http://www.scopus.com/inward/record.url?scp=33749559699&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33749559699&partnerID=8YFLogxK

U2 - 10.1117/12.293509

DO - 10.1117/12.293509

M3 - Conference article

AN - SCOPUS:33749559699

SN - 0277-786X

VL - 3241

SP - 56

EP - 67

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Materials, Structures, and Integrated Systems

Y2 - 10 December 1997 through 10 December 1997

ER -

Recent advances in piezoelectric materials

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this