Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process

Keyphrases

• Neural Network 100%
• Model Predictive Control 100%
• Plasma Etching Process 100%
• Model Predictive Controller 100%
• Etching Process 50%
• Recurrent Neural Network 50%
• Empirical Eigenfunctions 50%
• Proportional Integral Controller 50%
• Plasma Model 50%
• Kinetic Monte Carlo 50%
• Recurrent Neural Network Model 50%
• Chemical Reaction 25%
• Gas Flow 25%
• Neural Network Model 25%
• Training Data 25%
• Probability Distribution Function 25%
• Galerkin Models 25%
• Dominant Dynamics 25%
• Model Reduction 25%
• Order Reduction 25%
• Proper Orthogonal Decomposition 25%
• Prediction Model 25%
• Stochastic Characteristics 25%
• Plasma System 25%
• Control Objectives 25%
• Fluid Model 25%
• Discrete Sampling 25%
• Closed-loop Simulation 25%
• Inductive Coupled Plasma 25%
• Plasma Analysis 25%

Engineering

• Predictive Control Model 100%
• Recurrent Neural Network 100%
• Eigenvector 40%
• Integral Controller 40%
• Network Model 40%
• Closed Loop 20%
• Simulation Result 20%
• Fluid Model 20%
• Etching Process 20%
• Open Loop 20%
• Basis Function 20%
• Gas Flow 20%
• Model Reduction 20%
• Multiscale Model 20%
• Proper Orthogonal Decomposition 20%
• Plasma System 20%
• Control Objective 20%
• Probability Distribution Function 20%
• Inductive Coupled Plasma 20%

Chemical Engineering

• Predictive Control Model 100%
• Recurrent Neural Network 100%
• Model Predictive Controller 100%
• Recurrent Neural Network Model 50%
• Plasma System 25%