TY - JOUR
T1 - Reducing parasitic effects of actuation and sensing schemes for piezoelectric microelectromechanical resonators
AU - Mathieu, F.
AU - Larramendy, F.
AU - Dezest, D.
AU - Huang, C.
AU - Lavallee, G.
AU - Miller, S.
AU - Eichfeld, C. M.
AU - Mansfield, W.
AU - Trolier-McKinstry, S.
AU - Nicu, L.
N1 - Funding Information:
This publication was supported by the Pennsylvania State University Materials Research Institute Nanofabrication Lab and the National Science Foundation Cooperative Agreement No. ECS-0335765 . The French National Agency for Research (program ANR/PNANO 2008, project NEMSPIEZO ‘‘ANR-08-NANO-015 ’’) is gratefully acknowledged for financial support.
PY - 2013
Y1 - 2013
N2 - The co-integration of piezoelectric actuation and sensing capabilities on microelectromechanical systembased resonators can be a source of electrical cross-talk that, if not properly taken into account, may dramatically affect the interpretation of the device's output. In this paper, we identify three parasitic electrical effects pertaining to the most commonly used piezoelectric actuation and sensing schemes. To further investigate the impact of such parasitic effects, microcantilevers, bridges and membranes integrating a layer of sol-gel lead zirconate titanate (PZT) were fabricated and electrically characterized. Experimental results on the resonant characteristics were compared with simulations of the studied resonators' equivalent electrical models. Methods for reducing the design-dependent parasitic electrical effects such as mutual capacitances of less than 10 fF, electrical wiring or static capacitance mismatches of less than 20% of the integrated piezoelectric films are discussed.
AB - The co-integration of piezoelectric actuation and sensing capabilities on microelectromechanical systembased resonators can be a source of electrical cross-talk that, if not properly taken into account, may dramatically affect the interpretation of the device's output. In this paper, we identify three parasitic electrical effects pertaining to the most commonly used piezoelectric actuation and sensing schemes. To further investigate the impact of such parasitic effects, microcantilevers, bridges and membranes integrating a layer of sol-gel lead zirconate titanate (PZT) were fabricated and electrically characterized. Experimental results on the resonant characteristics were compared with simulations of the studied resonators' equivalent electrical models. Methods for reducing the design-dependent parasitic electrical effects such as mutual capacitances of less than 10 fF, electrical wiring or static capacitance mismatches of less than 20% of the integrated piezoelectric films are discussed.
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U2 - 10.1016/j.mee.2013.01.057
DO - 10.1016/j.mee.2013.01.057
M3 - Article
AN - SCOPUS:84885177500
SN - 0167-9317
VL - 111
SP - 68
EP - 76
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -